A few days ago, Ai Siqiang said that Osaka University of Japan had ordered a BM* Pro system capable of handling 4-inch substrates. The order was received in the third quarter of 2012.
Researchers at the Semiconductor Electronics Division of the Osaka Institute of Industrial Science will use this new device to produce carbon nanotube (CNT) and graphene structures for biosensors. The aim is to achieve electronic detection of specific proteins by combining graphene field effect transistors with organic drugs such as antibodies, antigens and aptamers. In addition, the BM Pro system will be used to produce carbon nanotubes for microelectromechanical systems (MEMS) and energy storage devices.
Ai Siqiang's system is favored by Osaka University because it provides a cost-effective overall solution. Ai Siqiang handles complex CVD processes, allowing researchers to devote more time and energy to component details. In research and development. The BM Pro system is easy to operate, flexible and proven, and can reliably grow a variety of nanotubes and graphenes for customers in a reproducible way. It is perfect for device development projects with high process reliability requirements. select. With Axel's technology, customers can choose to use the BM 300T system to mass produce 300mm wafers, making process transfer easy.
In order to meet the requirements of growing a variety of graphene and carbon nanotubes while achieving high quality consistency, Atheros BM Pro system is equipped with high-performance heaters with a heating rate of up to 300 ° / min, overhead wafer temperature control, pulse Plasma and automated processing. Designed for multi-user laboratories, the system features detailed data logging, safety interlocks and a reactor-integrated surveillance camera for reliable process monitoring.
Researchers at the Semiconductor Electronics Division of the Osaka Institute of Industrial Science will use this new device to produce carbon nanotube (CNT) and graphene structures for biosensors. The aim is to achieve electronic detection of specific proteins by combining graphene field effect transistors with organic drugs such as antibodies, antigens and aptamers. In addition, the BM Pro system will be used to produce carbon nanotubes for microelectromechanical systems (MEMS) and energy storage devices.
Ai Siqiang's system is favored by Osaka University because it provides a cost-effective overall solution. Ai Siqiang handles complex CVD processes, allowing researchers to devote more time and energy to component details. In research and development. The BM Pro system is easy to operate, flexible and proven, and can reliably grow a variety of nanotubes and graphenes for customers in a reproducible way. It is perfect for device development projects with high process reliability requirements. select. With Axel's technology, customers can choose to use the BM 300T system to mass produce 300mm wafers, making process transfer easy.
In order to meet the requirements of growing a variety of graphene and carbon nanotubes while achieving high quality consistency, Atheros BM Pro system is equipped with high-performance heaters with a heating rate of up to 300 ° / min, overhead wafer temperature control, pulse Plasma and automated processing. Designed for multi-user laboratories, the system features detailed data logging, safety interlocks and a reactor-integrated surveillance camera for reliable process monitoring.
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